摘要
The relative sputtering yield induced by highly charged Ar^q＋ impacting on Nb surface is investigated. The yield increases drastically as the incidence angle increases. A formula Y = A^＊ tan^B（θ） ＋C, developed from classical sputtering theory, fits well with the yield. By analysing a series of coefficients A and C extracted by curve fitting, the results demonstrate the presence of a synergy of the linear cascade collision and potential energy deposition.
The relative sputtering yield induced by highly charged Ar^q＋ impacting on Nb surface is investigated. The yield increases drastically as the incidence angle increases. A formula Y = A^＊ tan^B（θ） ＋C, developed from classical sputtering theory, fits well with the yield. By analysing a series of coefficients A and C extracted by curve fitting, the results demonstrate the presence of a synergy of the linear cascade collision and potential energy deposition.
基金
Supported by the National Natural Science Foundation of China under Grant No 10475035.
