摘要
全固态微陀螺无整体活动部件,具有测量范围大,抗冲击、抗震动能力强,对真空封装无较高的要求等方面的优点,是微型MEMS陀螺的一个重要发展方向,也是当前世界上相关领域的研究热点之一。本文针对全固态微型陀螺的概念、种类、特点、发展现状及趋势等方面进行了综合论述,最后着重阐述了一种具有崭新工作机理的压电型全固态微陀螺。本文为从事相关领域的技术研究提供背景知识参考。
There is no moving part in the all-solidstate micromachined gyroscope（ASMG）, so it contains a lot of advantages,such as large measuring range, anti-shock, anti-shake and no strict requirement for vacuum package. ASMG is an important direction for the micromachined gyroscope,and it is one of the researching hotspots in the worlck In the paper, the concept, category, properties and development of ASMG are reviewed. At last, a kind of novel piezoelectric ASMG is detailed. The paper is aimed to provide the background reference for the related research.
出处
《电子器件》
CAS
2008年第5期1505-1509,共5页
Chinese Journal of Electron Devices
基金
武器装备预演基金(9140A09020507JW0301)资助
上海交通大学青年基金资助
关键词
全固态
微陀螺
MEMS
压电
All-Solidstate
Micromachined gyroscope
MEMS
Piezoelectric
