摘要
提出了通过改变X射线入射角对粗糙样品表面作小面积成象X光电子能谱（XPS）分析的方法，以识别、消除或减少表面粗糙引起的遮蔽效应，获得比较真实的样品表面元素分布图。以表面粗糙的Ba－K－Bi－O超导膜为例，演示了变角分析法的应用。讨论了改变X光入射角对被分析面积的影响。
A methed for small area imaging XPS analysis by varying incidence angle is suggested to identify, diminish or reduce the shading effects caused by rough surface. An example of applications of this method is demonstrated by the analysis of rough surface superconducting Ba-K-Bi-O film . The effects of varying incidence angle on the analyzed area are discussed
出处
《分析仪器》
CAS
1997年第4期14-16,共3页
Analytical Instrumentation
基金
国家自然科学基金
