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基于偏振位相调制的位相轮廓测量 被引量:2

Polarization modulation based phase measuring profilometry
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摘要 本文介绍了一种用来测量三维物体面形的位相轮廓方法,它是通过将正弦光场投影到被测物面,该光场被物体表面调制后发生位相改变,利用偏振位相调制及位相检测算法计算物面的位相分布,再根据几何关系实现对物体三维形貌的测量。实验装置采用一种偏振位相调制的干涉光场投影装置对光场进行简便而精确的移相,采用CCD摄像机记录畸变光场,并用计算机处理和显示测量结果。文中给出了有关实验结果。 A phase measuring profilometry with the phase polarized modulation is described in this paper. A sinusoidal structure light is projected on, and deformed by the surface of a 3 D diffuse object, the surface profile can be obtained from a series of deformed images corresponding the projection light with N steps of phase polarized shifting. The experiment set is built up, in which a common path shearing polarized interferometer is designed for sinusoidal projector,a CCD camera is used for deformed intensity image record, then the surface data can be calculated by phase measuring algorithm, and the surface profile can be displayed on a micro computer monitor. The overall simplicity of the system, the stability of the projection light, the low cost of components and the ease of alignment make this a convenient system to implement.
作者 屠大维
出处 《光学技术》 CAS CSCD 1997年第6期27-29,51,共4页 Optical Technique
基金 上海市教委基金
关键词 结构光 轮廓测量 位相调制 面型测量 structure light, profile measurement, phase modulation.
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