摘要
光波导无源环形谐振器是微型光波导陀螺的核心敏感部件，其性能直接影响陀螺的极限分辨率和各误差项，是此种陀螺设计和制造中的关键。本文通过理论分析，对无源环形谐振器进行了深入的研究，提出了可行的光学系统设计，并结合现有先进的光学工艺，提出了加工与制造的方案。
The passive ring resonator is the core sensing element in the micro optic waveguide gyroscope. Its performances influence the minimum resolution and the error items of gyroscope directly. And, it is the key of the design and manufacturing. By theoretical analysis, the paper investigates the passive ring resonator in detail. At the same time, the feasible configurations of the optic circuit systems are proposed. According the current advanced optical manufacturing method, the schemes of the fabrication and manufacture has been presented.
出处
《光学技术》
CAS
CSCD
1997年第5期2-5,共4页
Optical Technique
基金
国防科工委微米/纳米技术"九五"预研重点项目
关键词
微型
光波导陀螺
无源环形谐振腔
光波导
micro optic waveguide gyroscope, passive ring resonator, waveguide.
