摘要
本文介绍采用剪切干涉实现结构光信号的方法和高反射率平行平晶的研制,使PMP方法效果更好,更利于实用化。
This paper uses the method of shearing interferometry to implement structure optical signal,and the high reflection rate optical flat is developped.It makes the result of the PMP method better and advantages practising.
出处
《光电子.激光》
EI
CAS
CSCD
1997年第5期390-393,共4页
Journal of Optoelectronics·Laser
关键词
形貌测量
剪切干涉
真空涂镀
PMP
shape measurement
shearing interferometry
vacuum coating