摘要
本文提出一种新型的光学探头的设计方法，该光学探头可以同时用来测量某一镜面反射表面某一点的离面位移和两个角度。本文同时采用了一个小功率激光器为光源，一种新型的ＣＭＯＳ图象传感器为光电传感器件。通过相关分析法和数据拟合等图象处理技术，提高了整套系统的精度和分辨率。一个较为明显的优点是位移和角度的测量是互不影响的。实验证实了该方法位移测量时具有精度为±１５微米，分辨率５微米；角度测量时具有精度±２５秒，分辨率１０秒。
In this paper a new type optical probe is designed.The optical probe can detect the out of plane displacement and two angles at one point on the reflective surface.Corresponding with method,a laser diodes(LD) and two new CMOS image sensors(CIS) are used as light source and photodetectors,respectively.And finally the accuracy and resolution are increased by using the correlation and data best fit image processing technolgy.One evident advantage of the probe is that the displacement and angle measurement has no influence to each other.The experimental results are presented,which demonstrate the new method has a high accuracy of ±15 μm and a resolution of 5 μm in displacement measurement,and a high accuracy of ±25 second and a resolution of 10 second in angle measurement.
出处
《光电子．激光》
EI
CAS
CSCD
1997年第5期344-349,共6页
Journal of Optoelectronics·Laser
关键词
光学探头
镜面反射表面
位移角度测量
传感器
optical probe
mirror reflective surface
noncontact
displacements and angle measurement
COMS image sensor(CIS)
