摘要
本文简要介绍了一种采用微结构平面螺旋线圈的新的ICP(电感耦合等离子体)光谱激发源。作者设计加工出的基于PCB(印刷电路板)镀金工艺的微型ICP激发源在13.56MHz下成功启燃,并给出了ICP火炬照片。详细介绍了作者研制的微型ICP激发源的平面螺旋电感和交指电容的参数设计方法,给出了设计版图和实物照片,微结构线条宽度和间隙在数百微米量级。展望了平面螺旋电感和交指电容在微型ICP激发源的中的应用前景。
This paper introduced a novel microfabricated ICP （inductively coupled plasma）source which adopted a planar spiral-shaped coil. This novel microfabricated ICP was based on PCB （printed circuit board） technology. When the RF frequency was 13.56MHz the author ignited the ICP source. Give the photographs of the argon plasma torches. This paper introduced the parameter design of in detail. Give the design drawings and the photographs of the planar spiral-shaped coil and the interdigitated capacitor which were process on the PCB. The width of microstructure lines and gap between them were several microns. At last, the potential application area of the planar spiral-shaped coil and the interdigitated capacitor was presented.
出处
《微计算机信息》
北大核心
2008年第26期287-289,共3页
Control & Automation
基金
河北省科技厅科技攻关计划项目(名称:微结构ICP激发源及其性能研究(07217124)
河北省教育厅科研项目(名称:基于微电子机械技术的微型ICP发生器(2004408)
关键词
微型ICP激发源
平面螺旋电感
交指电容
参数设计
microfabricated inductively coupled plasma source
planar spiral-shaped coil
interdigatiated capacitor
, parameter design
