摘要
This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.
设计、制造和测试了一种实现16×16MEMS光开关的高反射率、大角度静电扭转制动型微镜阵列.该阵列的微镜可进行90°扭转并保持稳定的扭转状态以对入射光进行导向.针对微镜的扭转驱动特性,提出了相应的机电模型.通过单片集成光纤槽,实现了光纤-微镜-光纤的无源对准.测试结果表明,微镜反射率为93.1%~96.3%,最低插入损耗为2.1dB,另外,在经过15min的5~90Hz,3mm振幅的振动测试后,光开关的插入损耗的改变值仅为±0.01dB.
