摘要
本文介绍了两种真空镀膜机观察窗的磁动挡板挡膜方法。取消了观察窗上内外相通的挡板轴封。在长期连续镀膜后，仍可清楚地进行观察。
Two kinds of methods are introduced that shelter of viewing window of vacuum coating machines drived by the magnetic force. The axle's seal of shelter that is connected with both inside and outside on the viewing window is abolished. The view will keep clearly after coating for the long period.
出处
《真空》
CAS
北大核心
1997年第5期29-31,共3页
Vacuum
