摘要
采用磁过滤直流真空阴极弧沉积技术在单晶硅片、载玻片、不锈钢片基体上制备了类金刚石(DLC)膜。用光学显微镜、椭偏仪、Raman光谱、X射线光电子能谱(XPS)、X射线衍射能谱(XRD)、纳米硬度计、摩擦磨损仪、洛氏硬度计检测了薄膜的组分、结构、光学、力学等相关特性。结果表明,膜中均存在着微米级的大颗粒分布。硅片上的薄膜厚度均为37nm左右,75V、100V偏压下制得的薄膜具有最高的sp3键含量,薄膜具有典型的DLC膜Raman光谱特征。玻片上的DLC膜具有良好的红外透射性能。不锈钢片上的薄膜为非晶碳结构,硬度受膜厚的影响显著,在空气中的摩擦因数均约为0.1左右,耐磨性能优良,随着膜厚的增加,膜与基体的结合性能变差。采用Cr/Cr–DLC膜(含铬DLC膜)作为不锈钢的梯度过渡层时可以极大地提高膜基间的结合性能。
Diamond-like carbon （DLC） films were deposited on monocrystalline silicon, wafer microscope slide glass and stainless steel plate by DC filtered cathodic vacuum arc technology. The composition, structure and properties of DLC films were investigated by spectroscopic ellipsometer, Raman spectroscopy, X-ray photOelectron spectroscopy（XPS）, powder X-ray diffraction（XRD）, spectrophotometer, nanoindenter, ball-on-disk tribometer, Rockwell apparatus and optical microscope. The results show that there are large particles with micron dimension in all films. The films deposited on silicon wafer are all about 37 nm thick, all have the typical Raman spectra characteristics of DLC, and the films with the highest content of sp3 bonding carbon atoms were deposited at 75 V and 100 V bias voltage. The film deposited on microscope slide glass exhibits good IR transparency. The film deposited on stainless steel plate has amorphous carbon structure. The measured hardness and elastic modulus of films deposited on stainless steel plate are highly dependent on the film thickness, the friction coefficients are all about 0.1 in air and all exhibit excellent wear resistance. The adhesion to substrate of the films deposited on stainless steel plate is greatly improved by applying Cr/Cr-DLC（Cr-containing hydrogenated diamond-like carbon） gradient interlayers, and worsened with the increase of films thickness.
出处
《中国表面工程》
EI
CAS
CSCD
2008年第4期27-35,共9页
China Surface Engineering
