摘要
The previous report （XI） gave the electrochemical-potential theory of the Bipolar Field-Effect Transistors. This report （XII） gives the drift-diffusion theory. Both treat 1-gate and 2-gate, pure-base and impure-base, and thin and thick base. Both utilize the surface and bulk potentials as the parametric variables to couple the voltage and current equations. In the present drift-diffusion theory, the very many current terms are identified by their mobility multiplier for the components of drift current,and the diffusivity multiplier for the components of the diffusion current. Complete analytical driftdiffusion equations are presented to give the DC current-voltage characteristics of four common MOS transistor structures. The drift current consists of four terms： 1-D （One-Dimensional） bulk charge drift term, 1-D carrier space-charge drift term,l-D Ex^2 （transverse electric field） drift term,2-D drift term. The diffusion current consists of three terms： 1-D bulk charge diffusion term,l-D carrier space-charge diffusion term,and 2-D diffusion term. The 1-D Ex^2 drift term was missed by all the existing transistor theories, and contributes significantly, as much as 25 % of the total current when the base layer is nearly pure. The 2-D terms come from longitudinal gradient of the longitudinal electric field,which scales as the square of the Debye to Channel length ratio, at 25nm channel length with nearly pure base, （LD/L）^2 = 10^6 but with impurity concentration of 10^18cm^-3 , （LD/L）^2 = 10^-2 .
上篇论文(XI)报告双极场引晶体管的电化电流理论,这篇论文(XII)报告飘移扩散理论.两篇都讨论了单栅双栅,纯基不纯基,薄基厚基的情形.两篇都用表面及内部电势作为参变量耦合电压方程和电流方程.在这飘移扩散理论中,有许多电流项,属飘移电流的用迁移率因子标识,属扩散电流的用扩散率因子标识.给出完备飘移扩散解析方程,用以计算四种常用MOS晶体管的直流电流电压特性.飘移电流有四项:一维体电荷漂移项,一维载子空间电荷漂移项,一维横向电场漂移项,二维漂移项.扩散电流有三项:一维体电荷扩散项,一维载子空间电荷扩散项,二维扩散项.现有的晶体管理论都没认识到一维横向电场漂移项.当基区几乎是纯基,这项贡献显著,约总电流的25 %.二维项来自纵向电场的纵向梯度,它随德拜长度对沟道长度比率的平方按比例变化.当沟道长度为25nm,几乎纯基时,(LD/L)2=106,杂质浓度1018cm-3时,(LD/L)2=10-2.
基金
CTSAH Associates (CTSA)资助~~
