摘要
利用非平衡磁控溅射技术在镜面抛光的SCM415渗碳淬火钢基片上沉积了无掺杂类金刚石(DLC)薄膜和不同含量Ti掺杂类金刚石(Ti-DLC)薄膜。利用AFM、SEM、TEM对薄膜的微观结构与形貌进行了观察,利用纳米硬度计、摩擦磨损试验仪及纳米划痕仪测试了薄膜的显微硬度、摩擦系数及薄基结合强度。结果表明:随着Ti的掺杂,薄膜硬度先迅速降低,然后保持不变,在Ti含量为25at%时薄膜硬度出现回升,膜基结合强度随Ti的掺杂呈单调增强趋势。与无掺杂类金刚石薄膜相比,掺杂Ti后薄膜表面微观凸凹增多,摩擦系数增大。对于Ti-DLC薄膜来说,随着Ti掺杂量的增加,摩擦系数出现减小的趋势。其原因在于Ti掺杂量的增加使Ti-DLC薄膜变得更加致密,同时Ti的掺杂还有利于弥补基体表面的凸凹缺陷,使薄膜变得更平滑。
Using unbalanced magnetron sputtering technique, hydrogen-free titanium-doped diamond-like carbon （Ti-DLC） films and hydrogen-free pure diamond-like carbon （DLC） film were deposited. Film morphology and microstructure were investigated by SEM, TEM and AFM. Microhardness, adhesion strength and friction coefficient of the films were investigated using nano indenter, scratch tester and ball-on-disc experiments. The results show that the hardness of Ti-DLC films decreases, and the adhesion strength increases drastically compared with pure DLC film. The hardness of the Ti-DLC films decreases to a stable value with increasing Ti content first and then increases when Ti content is above 25at% . This is due to the formation of nanocomposite structure of TiC nanocrystals dispersing in the amorphous DLC matrix. The friction coefficient of Ti-DLC films is lower than that of DLC film, and decreases with increasing Ti content,due to the fine and smoother surface of the Ti-DLC films.
出处
《材料热处理学报》
EI
CAS
CSCD
北大核心
2008年第3期147-151,共5页
Transactions of Materials and Heat Treatment
基金
重庆市自然科学基金资助项目(2006BB4050)
西南大学科技基金资助项目(SWNUF2005001)
