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体硅电容式双轴微加速度计的信号检测新方法 被引量：2

A New Method for Signal Detection of Bulk-Silicon Capacitive Dual-Axis Micro-Accelerometers
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摘要 在研究体硅电容式双轴加速度计结构部分,分析差分电容检测方法的基础上,提出了一种适合该加速度计的新型信号检测方法,此方法可有效地将两轴的混叠信号分别进行输出。通过HSPICE软件仿真验证了该方法的可行性。且依据0.5μmCMOSN阱工艺参数对总体电路进行模拟仿真,5V单电源供电,微加速度计单轴灵敏度为50mV/gn,频响为2.3kHz,量程为±50gn。 A novel signal detection method fitted for capacitive dual-axis micro-accelerometers is presented based on the research of the bulk-silicon capacitive dual-axis accelerometer＇s structure and analysis of differential capacitance detection method. This method could efficiently output the mixed signals on the two axes respectively. Its feasibility is verified by the simulation using HSPICE. Based on CSMC 0. 5 μm N well DPDM process SPICE BSIM3 MOS model （LEVEL=49） at 5 V power supply, the results of simulation are respectively, single-sensitivity 50 mV/g,, frequency respond 2. 3 kHz, and measurement scale ± 50 gn.
作者 刘晓为 王超 谭晓昀 董长春
机构地区 哈尔滨工业大学航天学院微电子科学与技术系
出处 《传感技术学报》 CAS CSCD 北大核心 2008年第3期490-493,共4页 Chinese Journal of Sensors and Actuators
关键词 双轴 差分电容 时分 信号检测 dual-axis differential capacitance signal detection time-division
分类号 TN492 [电子电信—微电子学与固体电子学]
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参考文献8

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共引文献45

同被引文献11

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  • 10周晓奇,郑阳明,金仲和,王跃林.基于FPGA的数字式电容检测系统[J].传感技术学报,2008,21(4):698-701. 被引量：8

引证文献2

二级引证文献8

传感技术学报
2008年 第3期

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