摘要
以场发射基本原理为基础,简化三极管阵列模型,采用有限差分法对微孔径场发射阵列进行了三维模拟。通过改变栅极孔径和尖锥高度并保持其它参数不变的情况,从而获得阳极电子束斑的直径。得到不同情况下的阳极电子束光斑直径的变化。分析了导致电子束光斑大小变化的原因。得出与实际相符合的数值模拟,为试验提供设计依据。
Based on field emission theory, the process of micro-hole field emission array is simulated through the simple construction by using finite difference. Changing the size of the gate hole and height of tips and keeping the other parameters invariable can alter the diameter of electron beam on the anode. Through the simulation we can obtain the relation between the size of the gate hole and the height of the tips and explain the reason. The numerical results are given for the experimental design in the real condition.
出处
《电子器件》
CAS
2008年第3期800-802,共3页
Chinese Journal of Electron Devices
关键词
场发射
有限差分
电子束
field emission
finite difference
electron beam
