摘要
简要总结了CVD金刚石薄膜应用研究的现状及进展.并结合CVD金刚石薄膜的市场前景和面临的难题,讨论了金刚石工具器件研究的趋势.
The present and advances in application research of diamond films were simply reviewed,and based on the fu-ture market and confronted problems in applicetion of chemical vapor deposited diamond films,the research tenden-cy in this field was also discussed.
出处
《表面技术》
EI
CAS
CSCD
1997年第6期5-6,共2页
Surface Technology
关键词
CVD
金刚石薄膜
发展趋势
薄膜材料
CVD Diamond Films,Application Research, Advances and Tendency