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金刚石薄膜应用研究的进展和趋势 被引量:2

Advances and Tetndency in Application Research of Diamond Films
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摘要 简要总结了CVD金刚石薄膜应用研究的现状及进展.并结合CVD金刚石薄膜的市场前景和面临的难题,讨论了金刚石工具器件研究的趋势. The present and advances in application research of diamond films were simply reviewed,and based on the fu-ture market and confronted problems in applicetion of chemical vapor deposited diamond films,the research tenden-cy in this field was also discussed.
出处 《表面技术》 EI CAS CSCD 1997年第6期5-6,共2页 Surface Technology
关键词 CVD 金刚石薄膜 发展趋势 薄膜材料 CVD Diamond Films,Application Research, Advances and Tendency
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  • 1唐璧玉,靳九成,陈宗璋.金刚石薄膜的合成和应用[J].表面技术,1996,25(4):36-38. 被引量:2
  • 2Seiichiro Matsumoto,Yoichiro Sato,Masayuki Tsutsumi,Nobuo Setaka. Growth of diamond particles from methane-hydrogen gas[J] 1982,Journal of Materials Science(11):3106~3112

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  • 1董丽芳,尚勇,王志军.电子辅助热丝化学气相沉积金刚石薄膜中氢原子谱线与最佳成膜条件[J].人工晶体学报,2005,34(3):550-552. 被引量:2
  • 2朱宏喜,毛卫民,冯惠平,吕反修,Vlasov I I,Ralchenko V G,Khomich A V.甲烷浓度对CVD金刚石薄膜晶体学生长过程的影响[J].无机材料学报,2007,22(3):570-576. 被引量:10
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  • 8MUSHTAQ A, ABUHIM D. Effects of Cobalt and Cobalt Oxi- de Buffer Layers on Nucleation and Growth of Hot Filament Chemical Vapor Deposition Diamond Films on Silicon (100) [ J ]. Korean Journal of Chemical Engineering, 2014, 31 (7) : 1271-1275.
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