摘要
针对半导体扩散炉温度控制融合问题,提出了3-9-3结构的BF神经网络控制方法.建模表明:BF网络数学模型具有良好的控制品质和实用、高效等特点.
According to the problem of temperature control of semiconductor diffuse kiln, an new control approach is described in the paper, such as BF NN. The RBF NN construct is 3 - 9 - 3. Simulation results show that control method has high quality and high effect.
出处
《吉首大学学报（自然科学版）》
CAS
2008年第2期77-78,82,共3页
Journal of Jishou University(Natural Sciences Edition)
基金
湖北省教育厅重点科学研究项目(D200625006)
