摘要
本文的目的在于优化甲醛气体传感器。微型甲醛气体传感器设计是以石英玻璃当作基材,白金(Pt)被当作微型加热器电阻来加热感测层,并以氧化镍(NiO)薄膜作为感测层。当环境内有甲醛气体存在时,NiO薄膜层上导电度会增加,因而导致感测层电阻值降低。此微传感器,膜厚为0.34μm,在300℃反应时间只需6秒,灵敏度可达13.5 kΩ/ppb,最低侦测限度可以量测到40 ppb。而本研究中针对不同的甲醛气体浓度,分别添加金当其催化剂、玻璃基材上共溅镀氧化镍与氧化铝、并比较有无指叉电极、改变基材温度…等,以提升其氧化镍薄膜感测性能。
The aim of this study is to optimize the performance of the formaldehyde gas sensor is enhanced in the study. Micro formaldehyde sensor is based on a quartz substrate utilizing with Pt micro -heater to heat the sensing layer （NiO thin film）. When formaldehyde exists in the air, the electrical conductivity of the NiO layer increases and the resistivity decreases. The thickness of the NiO film is 0.34 μm, the response time is 6 sec, the sensitivity is 13.5 kohm/ppb and the lowest detection limit is 40 ppb. In the present study, to enhance its sensing performance, co - sputtering NiO/Al2O3, changing electrode shape and changing working temperature are considered.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第2期394-398,共5页
Journal of Functional Materials and Devices
关键词
甲醛
氧化镍薄膜
微传感器
formaldehyde
NiO thin film
micro sensor
