摘要
介绍了利用光干涉法动态监控膜厚的原理,并介绍了对生产薄膜设备和镀膜设备在工作时对膜厚动态检测和控制。
This article briefly introduces the principles of metallic membrane plating through light interference and illustrates the movement inspection and control of film thickness while film production facilities and metallic membrane plating equipments are running.
出处
《上海电机学院学报》
2006年第4期70-71,75,共3页
Journal of Shanghai Dianji University
关键词
光学薄膜
光的干涉
光程差
镀膜
optics film
light interference
optical path difference
metallic membrane plating
