摘要
采用微机电系统加工技术制作出一种结构新颖的微型电磁式振动能量采集器,它可以把周围环境中的振动能转换为电能。整个结构主要由圆形SmCo28永磁体、铜平面弹簧和双层线圈构成。采用UV-LIGA技术和电镀技术制作铜平面弹簧和双层线圈,并与永磁体一起组装成试验样机,其体积大约为200mm3。Ansys有限元仿真结果表明共振结构的一阶固有频率为129.3Hz。对组装好的电磁式振动能量采集器试验样机的初步测试表明:在加速度为3g(g=9.8m/s2)的外界输入冲击下,负载两端的交流电压峰峰值为32.5mV。
A novel micro electromagnetic vibration energy harvester is presented, which can convert vibration energy into electrical energy according to electromagnetic induction law. It consists of a permanent magnet of SmCo28, a copper planar spring and a two - layer coil. The copper planar spring and two - layer coil are fabricated using UV - LIGA and electroplating technology. The size of the micro vibration energy harvester is about 200mm^3 in volume. The result of finite element simulations is that the natural frequency of the resonant structure is 129.3Hz. Initial measurement shows that the peak -to -peak voltage value of the load resistance is 32.5mV when the vibration energy harvester is under a shock with an acceleration of about 3g （g= 9.8m/s^2）.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第1期171-174,共4页
Journal of Functional Materials and Devices
基金
国家自然科学基金(No.50405013)
863计划(No.2006AA04Z360)
微米/纳米加工技术国家级重点实验室基金(No.9140C790301060C79)
上海市科委重点实验室基金(No.05dz22309)资助项目
关键词
振动能量采集器
微机电系统
电磁式
铜平面弹簧
双层线圈
vibration energy harvester
microelectromechanical system
electromagnetic
copper planar spring
two - laver coil
