摘要
利用傅利叶变换喇曼散射技术研究了CdTe表面的Raman散射谱，观察到了CdTe表面光学声子（TO、LO）的一级、二级斯托克斯、反斯托克斯Raman散射峰。实验同时还研究了经过机械抛光、化学机械抛光、化学腐蚀等不同表面处理后的CdTeRaman散射谱。实验表明Raman散射方法除可以用来表征晶体表面的完整性外，还能有效地探测样品的表面沾污情况。总的来说Raman散射技术有希望成为器件工艺过程中的一种表面无损检测手段。
The Raman spectra of the CdTe crystal are studied using FourierTransform Raman scattering (FT-Raman) technique. The Stokes and anti-Stokes,transverse optical(TO) and longitudinal optical (LO), one-phonon and two-phononscattering peaks are observed. The Raman spectra of the mechanically polished,chemicomechanically polished and chemically etched CdTe surfaces are also studied.The experiment results prove that the Raman technique can not only character thecrystalline surface perfection, but also detect and chemically identify elemental deposits on CdTe crystalline surface. In a word, the Raman scattering measuring maybecome a non-destructive surface reviewing step in the semiconductor device processing.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1997年第3期281-285,共5页
Research & Progress of SSE
