摘要
设计制作了一种电磁驱动式悬臂梁.为降低驱动电流,选择柔韧性较好的聚酰亚胺(PI)作为梁结构材料,其优良的绝缘性和耐热性保证了驱动线圈的功能实现.通过理论计算及有限元模拟仿真对悬臂梁动力响应及结构模态做了系统分析;根据分析结果,优化得到悬臂梁的结构参数.介绍了悬臂梁的制作工艺及流程,通过PI刻蚀、AZ4903光刻胶光刻、电铸等工艺过程,制作出PI悬臂梁及其末端驱动线圈.
We fabricated a kind of electromagnetic driving cantilever, and chose polyimide（PI） as the material to lower the driving current. And its good performance on insulation and heat-resist guarantees the performance of the driving winding. The dynamical response and structure mode of the micro cantilever were investigated by theoretical calculation and simulation analysis with ANSYS. The structure of the cantilever was optimized with the analytical results. And the manufacture technique was presented. The PI-cantilever and driving winding were fabricated after a series of process such as PI etching, AZ4903 lithography and electroplating, etc.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2007年第4期281-284,共4页
Nanotechnology and Precision Engineering
基金
国家自然科学基金资助项目(60578036)
中科院"优秀博士学位论文
院长奖获得者科研启动专项基金"资助项目
