摘要
以草酸溶液为电解液,采用二次氧化法制备了AAO模板,利用自制的实验装置,制备出了高度有序的多孔AAO模板,利用扫描电子显微镜(SEM)对其形貌进行了表征。分析了阴阳极间距、制备电压以及草酸溶液浓度对制备AAO模板的影响。经对比讨论,得到了制备AAO模板的优化条件为电压40V,草酸浓度0.5mol/L,阴阳极间距3～5cm。制备的AAO模板的纳米孔径约为100nm,纳米孔径排列规则、笔直且互相平行。分析了多孔AAO模板的形成机理。
The oxalic acide was used as electrolyte in the experiments and the two-step oxidation method was adopted to fabricate AAO templates. Scanning electron microscopy （SEM） was used to characterize the morphology of the templates. The effects of the voltage, solution concentration and anode-cathode distance on the ordered extent of as-prepared AAO templates were studied. Based on comparison and discussion, the optimum conditions of fabricating AAO templates were obtained： the voltage is 40 V, the oxalic concentration is 0.5 mol/L, and the distance between anode and cathode is 3-5 cm. The diameter of nanopores in the prepared AAO template is about 100nm. They are perfectly straight, arrange orderly, and parallel each other. Mechanism of AAO templates was analyzed.
出处
《微纳电子技术》
CAS
2008年第2期109-113,共5页
Micronanoelectronic Technology
基金
湖北省自然科学基金资助(2007ABA309)
国家重点基础研究发展计划(973)项目(2006CB932305)
关键词
阳极氧化铝模板
纳米孔
草酸溶液
二次氧化
阴阳极间距
anodic aluminum oxide （AAO） template
nanopores
oxalic acide
two-step oxidation
anode-cathode distance
