摘要
We present a multi-level growth model that yields some of the key features of perovskite oxide film growth as observed in the reflection high energy electron diffraction （RHEED） and ellipsometry studies. The model describes the effect of deposition, temperature, intra-layer transport, interlayer transport and Ostwald ripening on the morphology of a growth surface in terms of the distribution of terraces and step edges during and after deposition. The numerical results of the model coincide well with the experimental observation.
We present a multi-level growth model that yields some of the key features of perovskite oxide film growth as observed in the reflection high energy electron diffraction （RHEED） and ellipsometry studies. The model describes the effect of deposition, temperature, intra-layer transport, interlayer transport and Ostwald ripening on the morphology of a growth surface in terms of the distribution of terraces and step edges during and after deposition. The numerical results of the model coincide well with the experimental observation.
