摘要
采用中频反应磁控溅射方法和线性阳极层离子源实现了TiO2薄膜在线制备和在线离子束后处理。通过对薄膜光学性质的研究,发现氧离子束后处理对提高薄膜折射率,降低薄膜吸收率具有明显效果。为工业生产中,薄膜的在线制备及后处理提供了切实可行的手段。
Ion beam post-treatments were carried out online to improve the optical properties of as-deposited TiO2 thin films deposited by MF reactive magnetron sputtering. The ion beams were generated by a linear anode layer ion source. After ion beam post-treatments, it was found that the refractive index increases and optical absorbency decreases both obviously. The post-treatment thus provides an efficient way for improving the optical properties of TiO2 thin films.
出处
《真空》
CAS
北大核心
2008年第1期31-33,共3页
Vacuum
关键词
TIO2薄膜
离子束后处理
光学性质
中频反应磁控溅射
TiO2 thin film
ion beam post-treatment
optical property
MF reactive magnetron sputtering
