摘要
设计实现性能良好的温度控制是聚合物微纳热压工艺探索及高质量热压加工的必要条件。对热压机温控系统进行了建模分析;将飞升曲线法和最小二乘法相结合,对系统进行了辨识;针对系统模型参数的不确定性,设计并实现了基于系统辨识整定控制参数的PID(比例-积分-微分)控制器。实验证明,此控制器超调量0.5℃、系统稳态误差±0.2℃,并且有良好的适应性,满足微纳热压工艺要求。
Temperature is one of the important parameters in polymer micro/nano hot-embossing structures. It is essential to design and implement a high performance temperature controller to investigate the hot-embossing technology. The model of the hot-embossing temperature system was established. Stepping response method and least square fitting were used to identify the system. A self- tuning PID controller based on system identification control parameters was designed in view of the uncertainty of the model parameters. The results show that the overshoot is 0.5℃, the steadystate error is ±0.2℃, and good adaptability is achieved to satisfy the requirement Of the hot-embossing technology.
出处
《微纳电子技术》
CAS
2008年第1期45-50,共6页
Micronanoelectronic Technology
基金
国家科技支撑计划资助项目(2006BAF04B13)
国家自然科学基金资助项目(50605006)
关键词
热压
温度控制
系统辨识
PID控制器
hot-embossing
temperature control
system identification
PID controller
