摘要
回顾和概括了MEMS机电器件进入μm/nm尺度后解决的几个关键性问题。结合微机电器件发展的典型事例进行分析,对我国科学工作者在其中的贡献给予肯定。分析目前机电器件走向nm尺度的一些相关概念理解和需要着重研究的纳米效应问题。对机电器件从微到纳的发展趋势进行了展望。
Some key technique issues appearing with MEMS devices moving into the micro/nano size were reviewed and concluded. The contributing work by our researchers was confirmed by analysing some typical examples in MEMS development history, several important arguments and conclusions were given for the scientific road map from MEMS to NEMS. Especially, the nano size effects was focused that would have great influence on the NEMS devices. Finally, development prospects of the nano size was given.
出处
《微纳电子技术》
CAS
2008年第1期1-5,共5页
Micronanoelectronic Technology
关键词
微电子机械系统
纳电子机械系统
nm尺度效应
microelectromechanical systems （MEMS）
nanoelectromechanical systems （NEMS）
nano size effect
