摘要
六氟化钨在电子工业中有着广阔的应用前景,论述了目前工业化生产高纯六氟化钨(WF6)的方法、六氟化钨的质量标准、分析检测方法和六氟化钨的发展前景。
Tungsten hexafluoride has wide application in electronic industry. In this paper, the method for industrialized production of tungsten hexafluoride at present, quality standard of tungsten hexafluoride and analysis technique of tungsten hexafluoride were introduced, and the promising development of tungsten hexafluoride was summarized.
出处
《化学工业与工程》
CAS
2008年第1期87-91,共5页
Chemical Industry and Engineering
关键词
六氟化钨
合成
纯化
分析
tungsten hexafluoride
synthesis
purification
analysis
