摘要
用扫描电镜（ＳＥＭ）分析了真空电弧沉积ＴｉＮ膜中宏观颗粒（ＭＰ）的形态，并对观察结果给出了理论解释。电镜分析表明，ＴｉＮ膜中ＭＰ的形态与其粒径有关，粒径大的呈椭球形，粒径小的呈圆球形；ＭＰ与膜层之间有微小孔隙。理论分析表明，形成ＭＰ的液滴在飞行中温度降低的幅度是决定其形态的主要因素。
MPs (Macro Particles) in TiN films prepared by VAD (Vacuum Arc Deposition)are analyzed by SEM (Scanning Electron Microscopy).The SEM results are theoretically explained.SEM photos reveal that the MP shapes are dependent on their radii.The MPs with larger radii are oval shaped with relatively flattened top surface while the smaller MPs are ball shaped.There are micro voids beneath the MPs.It has been revealed that the observed phenomena are the results of temperature decrease during the flight of the MPs from the source to the substrate.
基金
国家自然科学基金
关键词
真空电弧镀膜
宏观颗粒
SEM
薄膜
氮化钛
vacuum arc deposition,\ macro particles,\ TiN films,\ scanning electronic microscopic analysis
