摘要
采用直流电沉积法在硫酸盐-氯化物镀液中制备了Fe-44wt％Ni纳米晶合金薄膜。通过原子力显微镜（AFM）、X射线衍射（XRD）、透射电子显微镜（TEM）以及开路磁测量装置，对Fe-44wt％Ni合金薄膜镀态和退火态样品的微结构和磁性能进行测量。结果表明：退火温度升高能够降低薄膜内应力，使薄膜结晶均匀，但对薄膜晶粒尺寸和磁性能影响很大。Fe-44wt％Ni合金薄膜是由γ-（Fe，Ni）相和α-（Fe，Ni）相构成。在250℃真空退火处理1h后Fe-44wt％Ni合金薄膜的晶粒尺寸在20～30nm之间，且具有良好的软磁性能，饱和磁感应强度BS为1．06T，矫顽力HC为40A／m。
Fe-44wt% Ni alloy film was prepared by DC electroplating technique in sulphate-chloride electrolyte. The morphology, microstructure and magnetic properties of the Fe-44wt% Ni film after heat treatment was investigated by means of SEM, AFM, TEM, XRD and magnetic measurement equipment. The results show that the interior stress greatly decreases and the crystalline size increases in the film as the heat treatment temperature increases. The Fe-44wt%Ni alloy film was identified as γ＋α phase. With the heat treatment temperature increasing, the transition of structure from γ-phase to α-phase in Fe-44wt% Ni film occurs. The optimum heat treatment temperature was determined. After heat treatment at 250℃ for one hour, the alloy film presents the structure with strong （111 ） and （200） fibre texture, the crystalline size of Fe-44wt% Ni film is 20-30nm, the saturated intensity of magnetization reaches 1.06T, the coercivity is 40A/m.
出处
《材料热处理学报》
EI
CAS
CSCD
北大核心
2007年第6期1-5,共5页
Transactions of Materials and Heat Treatment
基金
国家高技术研究发展计划(863计划)资助项目(2003AA30251)
北京市科技计划项目(D0405003040121)
关键词
Fe—Ni薄膜
热处理
微结构
纳米
软磁性能
Fe-Ni film
heat treatment
microstructure
nano-crystalline
soft magnetic
