摘要
介绍了一种利用圆环孔径和锥镜剪切散斑干涉技术检测缺陷的新方法,该方法是一种非接触式的检测方法,不受缺陷形状和位置的影响,能够准确地检测出缺陷的位置和大小。分析了圆环孔径锥镜剪切散斑干涉的基本原理,给出了散斑图全场滤波分析的平均光强解析式和实验结果。结果表明,该方法能在一张双曝光的散斑图上可同时记录物体在所有方向上的变形信息,并能连续地再现出来,散斑图的信息量丰富。在全场滤波分析时,适当选择滤波孔的位置,可得到清晰的缺陷的全场条纹图。在实时滤波分析观察时,将滤波孔连续地旋转,可观察到物体动态变形的全过程,散斑图的条纹在变化,而缺陷的位置不变,从而为缺陷检测或其它动态检测方面提供了一种新方法。
A new method of the defect measurement is proposed by using annular aperture cone glass shearing speckle photography. This is a non-contact method, which is not affected by form and position of the defect, and it can accurately measure the size and form of the defect. After analyzing the basic principle of annular aperture cone glass shearing speckle photography, the analytic formulas of average intensity of light and experimental results are given. The results show that the deformed information of an object in all directions can be recorded simultaneously on one double exposed speckle pattern. And a single speckle pattern can accommodate adequate information to replay the whole dynamic process of an object. During the process of replaying dynamic object, the position of defect doesn＇t change with the stripe variety of speckle photograph, while the filter aperture is rotating.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2007年第12期42-44,60,共4页
Opto-Electronic Engineering
关键词
激光技术
缺陷检测
圆环孔径
锥形剪切镜
位移导数
laser technique
defect measurement
annular aperture
cone glass shearing lens
derivatives of displacements
