摘要
目前有机太阳能电池是光电行业研究的热点之一。通常该器件以ITO为阳极，通过真空蒸镀的方法制作。在对器件进行测试时，ITO电极的设计制作，有利于器件的保护。用光刻技术进行ITO电极的制作，可以得到非常精细的结果。重点阐述了利用光刻方法制作优良ITO电极的注意点，包括表面清洗、曝光控制、显影控制和腐蚀工艺，其中由于不同ITO玻璃的导电层厚度、各成分含量不同，所以腐蚀工艺的研究是重点中的重点。提供了对生成光刻ITO电极的质量进行准确评价的一种简便方法。
At present organic solar cells are one of the research hot spots of optoelectronic devices.Usually, ITOs are used as anodes.The devices are manufactured through vacuum evaporation method. The design of ITO electrodes is beneficial to the protection of devices, when testing. We can obtain the extremely fine ITO electrode with lithography. This paper elaborates how to achieve ITO electrode, including superficial cleaning, exposure control, development control and etching control. The research of etching control is the key point, since different ITO-glasses have different layer thickness and ingredients content. Moreover this paper also provides a simple method to appraisal the quality of ITO electrode develooed by lithography.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第A04期1533-1535,共3页
Journal of Functional Materials
关键词
ITO电极
光刻
方块电阻
ITO-glass
lithography
sheet resistance
