摘要
利用大气开放式MOCVD在氧化铝基片上沉积ZnO薄膜，研究了沉积工艺参数对薄膜形貌的影响，结果表明基片温度对ZnO薄膜的晶体形貌有显著的影响，在一定的条件下能够沉积出具有高比表面积花瓣片层结构的ZnO薄膜。以酒精蒸气为例，研究了ZnO薄膜对碳氢有机化合物气体的气敏特性，结果表明结晶度高且晶粒细小、比表面积高的薄膜具有较好的气敏特性。
ZnO thin film has been deposited on Al2O3 substrate by atmospheric metal organic chemical vapor deposition （MOCVD） system. The influence of preparation conditions on morphology of the ZnO film was studied. The results show that the morphology is affected remarkably by the substrate temperature. ZnO films of petal and sheet grain with high specific surface area have been prepared at a certain deposition condition. The gas sensing characteristics to alcohol gas have been measured for the ZnO films. The results show that the films with tiny grains, high crystallinity and specific surface area have a high sensitivity to the hydrocarbons.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2007年第A07期2684-2686,共3页
Journal of Functional Materials
