摘要
用40%NH4F对Si(100)表面进行化学织构化,然后用十八烷基三氯硅烷(OTS)进行分子自组装,在织构化表面谷底区域形成液体凝聚(LC)相分子薄膜。织构化表面的典型山丘直径约30 nm,高约7 nm;典型的LC相OTS单层膜原子力显微镜(AFM)厚度约2.3 nm。随着反应时间的延长,OTS薄膜的LC相面积覆盖率逐渐增加,30m in后达到70%左右的平衡值。OTS组装8 min后的表面静态接触角即达108°左右,且表面接触角不再随反应时间的延长或LC相面积覆盖率的增加而明显变化。组装的OTS薄膜能显著改善织构化硅表面的摩擦学性能。
Si （100） surfaces were chemically textured with 40% N H4 F and octadecyltrichlorosilane （OTS） was applied to the further self-assembling. Liquid-condensed （LC） phase molecularly thin films were formed on the bottom areas of the textured surfaces. The typical hill of the textured surfaces has a diameter of about 30 nm and a height of about 7 nm. The typical atomic force microscopy （AFM） thickness of the LC-phase OTS monolayer is about 2. 3 nm. As reaction time increases, the LC-phase OTS film area coverage increases gradually and reaches the equilibrium value of about 70% after 30 min reaction time. The static contact angle of the 8 min OTS-assembled surfaces reaches about 108° and has no discernible change with the increase of reaction time or with the increase of LC-phase area coverage. The assembled OTS thin films can significantly improve the tribological properties of the textured silicon surfaces.
出处
《润滑与密封》
CAS
CSCD
北大核心
2007年第11期112-114,121,共4页
Lubrication Engineering
基金
广东省自然科学基金项目(7010253)
茂名学院博士启动基金项目(208032)
关键词
薄膜
自组装
OTS
形貌
性能表征
thin film
self-assembled monolayer
OTS
topography
performance characterization
