摘要
为了实现大口径长焦距透镜波面精确测量,提出了一种基于朗奇光栅泰伯效应、莫尔条纹技术的子波面斜率测量方法。当子孔径光束照射在朗奇光栅上时,在光栅后周期位置出现光栅的泰伯像,如果将另一朗奇光栅放在光栅泰伯像的位置,在这块光栅后就会形成莫尔条纹,莫尔条纹会因子孔径光束的斜率微小变化而产生移动,通过计数移动的莫尔条纹数就可以得出子孔径光束的波面斜率。文章推导了子波面斜率的计算公式并进行了理论分析,从实验上对理论分析进行了验证。这种方法能够用于大口径波面检测中子孔径波面斜率的精确测量。
In order to complete wavefront accurate measurement of large aperture long focal lens, a method for sub-wavefront slope of large aperture lens measurement based on Talbot effect moiré fringe technology is presented. When a Ronchi grating is illuminated by a sub-aperture beam, Talbot image can be obtained at periodic distance behind the Ronchi grating. If another Ronchi grating is put at the location of the Talbot image, moiré fringe will appear behind this grating. Moiré fringe moves sensitively when the slope of the illuminating sub-aperture beam changes slightly, so the slope of sub-aperture beam can be measured accurately by counting the number of the shifted moiré fringe. The formula of calculating the angle of sub-wavefront slope from the shifted moiré fringe numbers is derived. The experiment data is consistent with the theoretical analysis very well. This method can be applied to the sub-wavefront slope testing with high accuracy.
出处
《光电工程》
CAS
CSCD
北大核心
2007年第11期61-64,共4页
Opto-Electronic Engineering
基金
国家自然基金资助项目(10576028-A06)
