摘要
本文用掩膜工艺电子柬蚀刻技术产生具有潜影的聚酯(PET)薄膜,经强氧化液(浓硫酸与重铬酸钾的混合液)腐蚀,产生有序微米多孔阵列PET模板。讨论了辐照剂量、腐蚀时间以及腐蚀温度等因素对基膜蚀刻和腐蚀的影响。结果表明:随着辐照剂量、腐蚀温度和腐蚀时间的增加,PET基膜更易被腐蚀。IR、DSC测量结果表明:辐照导致化学键的断裂、非晶化转变,是导致辐照PET薄膜的腐蚀失重率增加的原因。用此方法制备了孔径大小一致的微米级有序多孔阵列PET模板。
In this paper, polyethylene terephthalare （PET） membrane irradiated by 2MeV E-beam through a mask and etched oxygenation corrosion to produce template were investigated. Effects of the irradiation dose, corrosion time and corrosion temperature on the weight loss of irradiated PET were discussed. The results showed that with increasing irradiation dose, corrosion time and corrosion temperature, the corrosion of irradiated PET membrane became easier. EB induced microscopic structural modifications and amorphous transformation were investigated by means of IR and DSC. It was found that the material underwent chemical degradation through bond breaking and crystalline structure of the material was gradually destroyed.
出处
《核技术》
EI
CAS
CSCD
北大核心
2007年第11期952-955,共4页
Nuclear Techniques
基金
上海市纳米科技与产业发展促进中心(G0905)
上海市重点学科(T0105)资助
