摘要
本文对射频辉光放电离子源用后电离方式产生中性粒子信号的机理进行了研究。介绍了放电等离子体的探针诊断与引出离子流的能量分析实验。得出了离子能量分布的中心在20～25eV适于用四极质谱分析的结论。
This paper studies the mechanism of generating the sputtered neutral signal by using post ionization process in RF glow discharge ion source. The experiment on probe detection of discharge plasma and the energy analysis of extracted ions are diseribed. It is identified that the energy distribution centre is about 20-25 eV and suits the quadrupole mass analysis.
出处
《东南大学学报（自然科学版）》
EI
CAS
CSCD
1989年第2期36-42,共7页
Journal of Southeast University：Natural Science Edition
关键词
辉光放电
离子源
表面信息
质谱
mass spectra, ion sources, glow dischange, plasma diagnostics
