摘要
介绍了用于实时多自由度测量的测量方法和当前的发展动态,给出了每种测试技术的测试原理和应用场合,比较各种技术的优缺点和适用范围。提出了一种新颖的基于激光外差干涉的多自由度测量方法,该方法有很高的精度和测量范围。
Several methods for measuring simultaneously multi - degree - of- freedom are introduced, and the development trend of the measuring technique is given , The principles and application situations in measuring multi - degree - of - freedom are discussed, in this paper. The advantages and disadvantages of various measuring methods are compared. At last , a novel method based on laser heterodyne interferometer for measuring multi - degree - of- freedom is proposed, and this method is capable of realizing long - range and high - accuracy.
出处
《激光杂志》
CAS
CSCD
北大核心
2007年第5期10-12,共3页
Laser Journal
基金
国家自然科学基金项目(60575055)
浙江省自然科学基合青年人才项日(R503197)资助
关键词
多自由度
外差干涉
测量技术
multi-degree-of -freedom
heterodyne interferometer
measuring technology
