摘要
主要介绍了椭偏仪的测量原理,比较了不同结构的椭偏仪,并根据具体应用需求介绍了椭偏光谱仪、红外椭偏光谱仪、成像椭偏仪和广义椭偏仪,分析了椭偏仪的数据处理过程,最后展望了椭偏仪的发展趋势。
The working principle of the ellipsometers is described. Different configurations of ellipsometers are compared. According to different applications, spectroscopic ellipsometer, infrared spectroscopic ellipsometer, imaging ellipsometer and generalized ellipsometer are introduced, respectively. The data processing of ellipsometer is also analyzed. Finally, the future development of ellipsometer is prospected.
出处
《激光与光电子学进展》
CSCD
北大核心
2007年第3期43-49,共7页
Laser & Optoelectronics Progress
基金
国家自然科学基金(60578051)
上海市科委国际合作计划项目(051107085)资助课题
关键词
椭偏仪
膜厚
折射率
ellipsometer
thickness of thin film
refractive index
