摘要
随着MEMS传感器在各个领域的广泛应用,传感器领域的标准化工作思路和技术路线发生了变化。论述了目前国内外MEMS传感器标准的现状,并就国内外MEMS传感器标准体系的发展过程、特点、标准体系存在的问题、与现有半导体标准的关系进行了分析探讨,同时,对我国MEMS传感器标准的发展对策提出了建议。
With the application of MEMS sensor in a lot of fields, working theories and technique ways of standardization in sensor fields are changed. The current status of MEMS sensor standardization at home and abraod is discussed, and the development process, characteristics and existing problems of MEMS sensor system in connection with current semicondition standardization are analyzed. The proposal of MEMS sensor development is provided.
出处
《传感器与微系统》
CSCD
北大核心
2007年第8期6-8,共3页
Transducer and Microsystem Technologies
关键词
微电子机械系统
传感器
标准
半导体
micro electromechanical system （MEMS）
sensors
standardization
semiconductor
