摘要
为了研究空气阻尼对谐振器工作性能的影响,基于Euler-Bernoulli假设、梁弯曲振动理论和气体阻尼理论,建立了考虑气体阻尼的梁振动方程,结合边界条件对方程进行了求解,得到了两种不同情况下气体阻尼对微梁谐振器的谐振频率和品质因子的影响.通过两种阻尼对谐振器影响的比较分析,指出在梁形状保持不变(长宽比和高宽比不变)情况下,微梁谐振器存在一个临界压膜厚度,此临界厚度可为器件的设计提供参考.
To research the effect of air damping on resonators, based on the Euler-Bernoulli assumption, beam vibration mechanism and air damping theory, a vibration equation was established and its solution was obtained according to corresponding boundary conditions. The air damping influences on the resonant frequency and quality factor of a micro-beam resonator were obtained under two different conditions. By analyzing air damping in two different ways, it is found that a critical squeeze-film thickness exists under the condition that the aspect ratio of the beam is constant, and the obtained expression of critical thickness can give some suggestions to devices designing.
出处
《北京科技大学学报》
EI
CAS
CSCD
北大核心
2007年第8期841-844,共4页
Journal of University of Science and Technology Beijing
关键词
微谐振梁
空气阻尼
谐振频率
品质因子
micro-beam resonator
air damping
resonant frequency
quality factor
