摘要
本文分析了FCG-1型仿形仪的静态精度,指出对静态精度有较大影响的因素是传感器的X,Y,Z三个轴的垂直度误差;阿贝误差;模指变形;温度。
The static accuracy of FCG-1 Tracer is analysed in the paper, the factors effecting the static accuracy are the verticality errors of X,Y and Z axes,Abbe error,probe deformation and temperature.
出处
《光电工程》
CAS
CSCD
1990年第6期58-62,共5页
Opto-Electronic Engineering
