摘要
采用光声室和压电陶瓷两种检测方式,研究了不同厚度的单晶硅表面光洁度变化对光声信号的影响。结果表明,样品越薄,随着样品表面光洁度变差,光声信号增加得越迅速。
We investigated the influence of surface finish of single crystal silicon ofdifferent thickness on the opticacoustic signal.Results show that when the sampleis thinner,the surface finish of sample is worse,and the optic-acoustic signal isincreased more rapidly.
出处
《光电工程》
CAS
CSCD
1990年第5期45-49,共5页
Opto-Electronic Engineering
关键词
单晶硅
表面光洁度
声光信号
Photoacoustic spectra,Optoacoustic detection, Single crystals,Finish
