摘要
采用溶胶-凝胶方法制备WO3前驱液,利用浸渍-提拉法使其成膜。通过XRD分析了不同热处理温度对WO3晶体结构的影响,通过SEM图观察了不同提拉次数的WO3薄膜形貌。所得WO3薄膜的微观结构和气敏性能随提拉次数不同而有很大差异,提拉1次、2次的样品薄膜不连续,电阻过大,灵敏度无法测量;提拉3次成膜的样品电阻稳定,气敏性能最好,对NO2有很高的灵敏度。
WO3 precursor solution was prepared by Sol - gel method. The films were printed by dip - coating method. The microstructure of the WO3 films which were annealed at different temperature was investigated by XRD. The WO3 film shape was observed by SEM. There were various differences in microstmcture and gas sensing of the WO3 films of different dip - coating times. Once or twice dip- coating film were discontinuous, the resistance was large and the sensitivity couldn＇t be measured. The resistance of the film dip - coating 3 times was stable. The film has high sensitivity to NO2.
出处
《沈阳航空工业学院学报》
2007年第2期68-70,共3页
Journal of Shenyang Institute of Aeronautical Engineering
