摘要
提出了一种基于MEMS技术的在线式微波功率传感器结构,并对该结构进行了理论分析、设计、制作和测量.该结构通过测量由MEMS膜耦合出的一小部分微波功率实现功率的测量.该结构制作工艺与GaAs MMIC工艺完全兼容.测量结果显示,在12GHz频率以内,微波功率传感器的反射系数小于-15dB,插入损耗小于2dB,在10GHz中心频率下的灵敏度为10.4μV/mW.
A novel structure of an inline type microwave power sensor is presented based on MEMS technology. The theory, design, fabrication, and measurements are given. The microwave power coupled from the CPW line is measured by the MEMS membrane. The fabrication process of this power sensor is fully compatible with a GaAs MMIC process. In this method the signal is available during power detection. The results show that the sensor has a reflection of less than - 15dB and an insertion loss of less than 2.0dB up to 12GHz. The sensitivity of this power sensor is 10.4μV/mW at 10GHz.
基金
国家自然科学基金(批准号:60676043)
装备预先研究基金(批准号:51308050202)资助项目~~
