摘要
采用磁控溅射法在高速钢(HSS)基片上制备了氮化碳(CNx/TiN)复合薄膜,并采用球-盘式摩擦试验法对其摩擦学性能进行了研究。通过分析薄膜的摩擦系数变化曲线,并辅之以薄膜摩擦表面形貌的显微观察分析以及EDS微区成分分析,对薄膜的摩擦学性能进行了表征。结果表明,CNx/TiN复合薄膜与对偶球(Si3N4)之间的摩擦系数约为0.3。具有较好的减摩性能,但复合薄膜的耐磨性能受制备工艺的影响较大。沉积合适的TiN/Ti过渡层可以显著提高薄膜的耐磨性能。薄膜的磨损机理主要为磨粒磨损与黏着磨损以及疲劳磨损相互结合。
Carbon nitride(CNx/TiN)composite films was prepared on high-speed steel substrate using magnetron sputtering technique.The friction and wear behavior of the carbon nitride films was investigated using a ball-on-disk test rig.The friction coefficient curves were discussed,the worn surface morphology of the film was observed using a scanning electron microscope,and the elemental composition of the worn surface was determined using energy dispersive spectroscopy.The results showed that the friction coefficient for the films sliding against Si3N4 ball was about 0.3,showing fair friction-reducing behavior.However,the wear resistance of the films was highly dependent on the preparation process.Moreover,it was feasible to greatly increase the wear resistance of the CNx/TiN composite films by introducing proper transition layer of TiN/Ti,and the main wear mechanism of the films included abrasive wear,adhesion wear and fatigue wear.
出处
《材料保护》
CAS
CSCD
北大核心
2007年第7期18-20,共3页
Materials Protection
关键词
氮化碳薄膜
磁控溅射
摩擦学性能
磨损机理
高速钢
carbon nitride films
magnetron sputtering
friction and wear behavior
wear mechanism
high speed steel
