摘要
研究了接触电阻和薄膜体电阻对场发射的影响,计算机仿真和场发射实验表明电阻的大小直接影响强电场下的场发射而对开启电场基本没有影响,随着电阻的增大场发射逐渐偏离Fowler-Nordheim特性而向线性变化过渡。在场发射模型分析的基础上,给出了平面碳基薄膜阴极的等效电路发射模型,分析表明接触电阻的大小严重影响发射的均匀性,因此优化碳膜的制备条件,保证碳膜与金属电极的良好电接触对提高发射性能、改善发射均匀性有重要的意义。
Influence of contact resistance and film resistance on field emission properties was studied. Computer simulation and experimental results reveal that the magnitude of resistance mainly affects electron emission at high electric field. The characteristics of field emission deviate from Fowler-Nordheim law with the increase of resistance value. The model of equivalent circuit for carbon-based cathode was given according to the analysis of field emission model. The experimental result shows that the uniformity of field emission is affected by the magnitude of contact resistance to a great extent. It is concluded that good contact between film and metalelectrode is important for the improvement of emission properties and emission uniformity of the carbon-based film.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2007年第3期379-382,共4页
Semiconductor Optoelectronics
基金
教育部科学技术重点研究项目(205091)
关键词
场发射
碳基薄膜
接触电阻
field electron emission
carbon-based film
contact resistance
