摘要
根据光谱光学相干层析(OCT)技术的原理,建立了光谱光学相干层析系统,并利用该系统测量了膜系的反射光谱。该方法通过傅里叶变换实现了光学相干层析信号光谱信息的提取,克服了传统反射测量方法测量结果不直观、受非测量面干扰等问题。测量所得的光谱反射率,与商业仪器的测量值吻合较好,均方差仅为0.0488。
A spectroscopic optical coherence tomography(OCT)system based on the principle of spectroscopic OCT was built,and the reflectance spectrum of multilayer film was measured.This method uses the Fourier transform to pick out the spectral information of OCT signals,and overcomes such limitations of existent film reflectivity measurement methods as lack of intuitionstic results and non-metrical surface interference.The gained spectral reflectivity matches well with the result calibrated by commercial instrument,and the mean square error turns out to be only 0.0488.
作者
陈宇恒
丁志华
孟婕
CHEN Yu-heng;DING Zhi-hua;MENG Jie(Institute of Modern Optical Technology,Soochow University,Suzhou,Jiangsu 215006,China;Jiangsu Provincial Key Laboratory of Modern Optical Technology,Suzhou,Jiangsu 215006,China;State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou,Zhejiang 310027,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2007年第6期825-828,共4页
Chinese Journal of Lasers
基金
国家863计划(2006AA02Z4EO)
国家自然科学基金(60378041,60478040)
浙江省自然科学基金(Z603003)
教育部博士点基金(20030335099)
霍英东青年教师基金(91010)
教育部新世纪优秀人才支持计划
浙江省"新世纪151人才工程"资助项目
关键词
薄膜
光谱测定
光谱光学相干层析
傅里叶变换
多层膜系
反射率
thin films
spectrum mensuration
spectroscopic optical coherence tomography
Fourier transform
multilayer film
reflectivity
