摘要
介绍了Synopsys Inc.新近推出的新一代纳米层次器件物理特性仿真工具——SenTaurus Device的功能特点以及进行器件物理特性仿真的典型流程。重点介绍了为实现nm级器件物理特性的模拟引入的诸多近代器件物理模型。利用SenTaurus Device对基于Sentaurus Process生成的一个90nm NMOS器件进行了器件物理特性仿真,并给出了相应结果。
The functional characteristics and typical simulation flow of SenTaurus Device the new generation physical characteristic simulation tool were described, and several recent physical models for the simulation of nano-level device were emphatically introduced. Based on a 90 nm NMOS produced by Sentaurus Process, the simulation was run on Sentaurus Device, and the results of the nano-level device were presented.
出处
《微纳电子技术》
CAS
2007年第6期299-304,共6页
Micronanoelectronic Technology
