摘要
研制了非加热气敏元件（传感器），同时研究了元件不同温度在ＳｎＯ２表面吸附状态与气敏性的关系，指出了元件有一定选择性的主要原因．该元件主要特点不需要外加热．因此功耗低、工艺结构简单、易薄膜化、集成化，适于大规模生产。
The non-heating gas sensor is prepared. The correlation between the state of adsorbed ocygen on the surface of SnO 2 at different temperature and gas sensing properties are studied. The first character of the sensor is non-hesting so its power consumption is low,its structure issimpleand easy to make film and integration. It will apply tolarge-scale prodution and widespread uses.
出处
《云南大学学报（自然科学版）》
CAS
CSCD
1997年第2期133-134,138,共3页
Journal of Yunnan University(Natural Sciences Edition)
